Yoshihiro Shiode
25Patents
6h-index
11Co-inventors
66Inventor score
Filing activity: Mar 20, 2001 → Jan 31, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8842294B2 | Position detection apparatus, imprint apparatus, and position detection method | Emerging Cross-Sectional Technologies | 23 | Active |
| US9283720B2 | Position detection apparatus, imprint apparatus, and position detection method | Emerging Cross-Sectional Technologies | 18 | Active |
| US6633390B2 | Focus measurement in projection exposure apparatus | Physics | 16 | Expired |
| US6982786B2 | Reticle and optical characteristic measuring method | Physics | 10 | Expired |
| US7190443B2 | Reticle and optical characteristic measuring method | Physics | 8 | Expired |
| US8678808B2 | Imprint apparatus and article manufacturing method | Performing Operations; Transporting | 6 | Active |
| US9285675B2 | Imprint apparatus | Performing Operations; Transporting | 5 | Active |
| US7193713B2 | Method and apparatus for measuring optical characteristic, and projection exposure apparatus using the same | Physics | 5 | Expired |
| US7221434B2 | Exposure method and apparatus | Physics | 5 | Expired |
| US9400426B2 | Imprint apparatus | Performing Operations; Transporting | 5 | Active |
| US6960415B2 | Aberration measuring method and projection exposure apparatus | Physics | 4 | Expired |
| US9798231B2 | Imprint apparatus and method of manufacturing article | Performing Operations; Transporting | 3 | Active |
| US7499179B2 | Measurement method and apparatus, exposure apparatus, exposure method, and adjusting method | Physics | 2 | Active |
| US10828808B2 | Imprint apparatus, imprint method, and method of manufacturing article | Performing Operations; Transporting | 1 | Active |
| US7468798B2 | System and method for polarization characteristic measurement of optical systems via centroid analysis | Physics | 1 | Active |
| US7826044B2 | Measurement method and apparatus, and exposure apparatus | Physics | 1 | Active |
| US11400619B2 | Imprint method and article manufacturing method | Performing Operations; Transporting | 1 | Active |
| US7423740B2 | Reticle and optical characteristic measuring method | Physics | 1 | Expired |
| US10705422B2 | Imprint method | Performing Operations; Transporting | 0 | Active |
| US11413651B2 | Imprint apparatus, operation method of imprint apparatus, and article manufacturing method | Physics | 0 | Active |
| US10095117B2 | Imprint apparatus | Performing Operations; Transporting | 0 | Active |
| US9921470B2 | Imprint method for an imprint apparatus which transfers a pattern onto a substrate by using a mold | Performing Operations; Transporting | 0 | Active |
| US12399425B2 | Molding apparatus and article manufacturing method | Physics | 0 | Active |
| US7375805B2 | Reticle and optical characteristic measuring method | Physics | 0 | Active |
| US11759994B2 | Imprint apparatus, imprint method, and article manufacturing method | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.