Patent · US Active

All silicon broadband ultra-violet metasurfaces

US11402543B2 · kind B2 · utility

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0References
5Claims
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Assignee

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Key dates

Filing dateJul 9, 2019
Grant dateAug 2, 2022
Priority date
Expiry dateJan 10, 2040

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B5/283
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A device has a substrate transparent to ultraviolet (UV) light, and at least one metalens formed of a material having large permittivity of UV light on the substrate. A device has a UV reflector, a UV transparent film on the reflector, and at least one metalens formed of a material having large permittivity of UV light on the film.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.