Method and circuit for obtaining capacitive feedback signal of capacitive feedback-type micro torsion mirror
US11402952B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2020 |
| Grant date | Aug 2, 2022 |
| Priority date | — |
| Expiry date | Apr 20, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2207/03
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method and circuit for obtaining a capacitive feedback signal of a capacitive feedback micro torsion mirror are provided to solve the problem of poor stability of the capacitive feedback signals of the micro torsion mirror. First, a pulse signal is used as a driving signal to drive the capacitive feedback micro torsion mirror to vibrate; it is ensured that the micro torsion mirror may twist freely for at least 0.5 cycles during an interval of two adjacent sets of driving pulses; secondly, the capacitive feedback signal of the capacitive feedback micro torsion mirror is extracted, and converted into a voltage signal; then, the voltage signal is amplified; and finally extracted during the interval of the two adjacent sets of driving pulses, and taken as a real capacitive feedback signal. A carrier generation circuit and a detection circuit are omitted, and the influence of the carrier generation circuit and the detection circuit on a capacitive feedback signal is eliminated. The circuit is more concise and the stability of the capacitive feedback signal is improved. Further, a specific driving form and signal extraction manner are used to obtain the real capacitive feedback signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.