Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
US11419202B2 · kind B2 · utility
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13References
18Claims
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Assignee
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Key dates
| Filing date | Jan 11, 2021 |
| Grant date | Aug 16, 2022 |
| Priority date | — |
| Expiry date | Jan 11, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0027
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
The present disclosure is directed to laser produced plasma light sources having a target material, such as xenon, that is coated on the outer surface of a drum. Bearing systems rotate the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.