Brian Ahr
9Patents
2h-index
24Co-inventors
43Inventor score
Filing activity: Jul 18, 2014 → Sep 14, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9544984B2 | System and method for generation of extreme ultraviolet light | Emerging Cross-Sectional Technologies | 6 | Active |
| US10021773B2 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Electricity | 4 | Active |
| US10880979B2 | Droplet generation for a laser produced plasma light source | Electricity | 1 | Active |
| US10893599B2 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Electricity | 0 | Active |
| US11635700B2 | Method and apparatus for EUV mask inspection | Electricity | 0 | Active |
| US11343899B2 | Droplet generation for a laser produced plasma light source | Electricity | 0 | Active |
| US12418972B2 | Confocal chromatic metrology for EUV source condition monitoring | Electricity | 0 | Active |
| US11419202B2 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Electricity | 0 | Active |
| US10261911B2 | Apparatus and method for computational workflow management | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.