Inventor · San Jose, CA, US

Brian Ahr

9Patents
2h-index
24Co-inventors
43Inventor score

Filing activity: Jul 18, 2014 → Sep 14, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9544984B2 System and method for generation of extreme ultraviolet light Emerging Cross-Sectional Technologies 6 Active
US10021773B2 Laser produced plasma light source having a target material coated on a cylindrically-symmetric element Electricity 4 Active
US10880979B2 Droplet generation for a laser produced plasma light source Electricity 1 Active
US10893599B2 Laser produced plasma light source having a target material coated on a cylindrically-symmetric element Electricity 0 Active
US11635700B2 Method and apparatus for EUV mask inspection Electricity 0 Active
US11343899B2 Droplet generation for a laser produced plasma light source Electricity 0 Active
US12418972B2 Confocal chromatic metrology for EUV source condition monitoring Electricity 0 Active
US11419202B2 Laser produced plasma light source having a target material coated on a cylindrically-symmetric element Electricity 0 Active
US10261911B2 Apparatus and method for computational workflow management Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.