Patent · US Active

Stage and electrode member

US11421323B2 · kind B2 · utility

0Cited by

0References

14Claims

0Family size

Assignee

TOKYO ELECTRON LIMITED · JP

Inventors

Daisuke Hayashi · Nirasaki, JP
Shinya Ishikawa · Rifu, JP

Key dates

Filing date	Jul 8, 2019
Grant date	Aug 23, 2022
Priority date	—
Expiry date	Dec 27, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/68735
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A stage for mounting a workpiece and an edge ring is provided, the stage including a first flow path and a second flow path along each of which a fluid flows, within the stage; a bifurcation at which an inlet port of the first flow path and an inlet port of the second flow path are coupled; a junction at which an outlet port of the first flow path and an outlet port of the second flow path are coupled; and a member provided at least one of the bifurcation and the junction, the member having at least one opening that communicates with the first flow path and the second flow path.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.