Waveguide with attenuator
US11422303B2 · kind B2 · utility
1Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2020 |
| Grant date | Aug 23, 2022 |
| Priority date | — |
| Expiry date | Dec 1, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12126
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to a waveguide structure with attenuator and methods of manufacture. The structure includes: a waveguide structure including semiconductor material; an attenuator underneath the waveguide structure; an airgap structure vertically aligned with and underneath the waveguide structure and the attenuator; and shallow trench isolation structures on sides of the waveguide structure and merging with the airgap structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.