Substrate transport apparatus
US11426865B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2018 |
| Grant date | Aug 30, 2022 |
| Priority date | — |
| Expiry date | Nov 14, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20329
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.