Super-resolution holographic microscope
US11428947B2 · kind B2 · utility
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12References
19Claims
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Key dates
| Filing date | Apr 14, 2020 |
| Grant date | Aug 30, 2022 |
| Priority date | — |
| Expiry date | Nov 12, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2227/03
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A super-resolution holographic microscope includes a light source configured to emit input light, a diffraction grating configured to split the input light into first diffracted light and second diffracted light, a mirror configured to reflect the first diffracted light, a wafer stage arranged on an optical path of the second diffracted light and on which a wafer is configured to be arranged, and a camera configured to receive the first diffracted light that is reflected by the mirror and the second diffracted light that is reflected by the wafer to generate a plurality of hologram images of the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.