Optical device including lid having first and second cavity with inclined sidewalls
US11430906B2 · kind B2 · utility
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17Claims
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Key dates
| Filing date | Jul 22, 2019 |
| Grant date | Aug 30, 2022 |
| Priority date | — |
| Expiry date | May 11, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S17/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical device includes a substrate, an electronic component and a lid. The electronic component is disposed on the substrate. The lid is disposed on the substrate. The lid has a first cavity over the electronic component and a second cavity over the first cavity. The sidewall of the second cavity is inclined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.