Transfer device, processing system, and transfer method
US11434087B2 · kind B2 · utility
0Cited by
4References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 12, 2021 |
| Grant date | Sep 6, 2022 |
| Priority date | — |
| Expiry date | Feb 12, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transfer device comprises a transfer arm to which a pick is attached and an inclination adjusting mechanism disposed below the transfer arm and configured to adjust an inclination of the transfer arm. The inclination adjusting mechanism includes an upper portion fixed to a lower portion of the transfer arm, a lower portion disposed below the upper portion to face the upper portion, a support portion that rotatably supports the upper portion with respect to the lower portion, and at least two actuators disposed between the upper portion and the lower portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.