MEMS-based nanoindentation force sensor with electro-thermal tip heating
US11435378B2 · kind B2 · utility
1Cited by
5References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2020 |
| Grant date | Sep 6, 2022 |
| Priority date | — |
| Expiry date | Nov 28, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0617
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS microforce sensor for high temperature nanoindentation is used for determining a mechanical property of a sample by sensing a deflection and measuring a force. The MEMS microforce sensor includes at least a cold movable body, a heatable movable body, a heating resistor and capacitor electrodes. The cold movable body and the heatable movable body are mechanically connected by at least one bridge and the capacitor electrodes measure a force applied on the sample by sensing the deflection of the cold movable body relative to the outer frame by a change of electrical capacitance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.