Patent · US Active

Method and devices for determining metrology sites

US11436506B2 · kind B2 · utility

0Cited by

1References

27Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Abhilash Srikantha · Neu-Ulm, DE
Christian Wojek · Aalen, DE
Keumsil Lee · Palo Alto, US
Thomas Korb · Schwäbisch Gmünd, DE
Jens Timo Neumann · Shanghai, CN
Eugen Foca · Lauchheim, DE

Key dates

Filing date	Mar 3, 2020
Grant date	Sep 6, 2022
Priority date	—
Expiry date	Apr 3, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG06V2201/06
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Methods for determining metrology sites for products includes detecting corresponding objects in measurement data of one or more product samples, and aligning the detected objects are aligned. The methods also include analyzing the aligned objects, and determining metrology sites based on the analysis. Devices use such methods to determine metrology sites for products.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.