Inventor · Schwäbisch Gmünd, DE

Thomas Korb

28Patents
2h-index
42Co-inventors
57Inventor score

Filing activity: Aug 8, 1996 → Oct 12, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US5690056A Squirrel proof bird feeder Human Necessities 14 Expired
US9500954B2 Illumination system of a microlithographic projection exposure apparatus Physics 2 Active
US10901391B1 Multi-scanning electron microscopy for wafer alignment Emerging Cross-Sectional Technologies 2 Active
US9910360B2 Lighting system of a microlithographic projection exposure system and method for operating such a lighting system Physics 2 Active
US9310690B2 Illumination system of a microlithographic projection exposure apparatus Physics 1 Active
US12175650B2 Processing image data sets Physics 1 Active
US10042248B2 Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unit Physics 1 Active
US9946161B2 Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method Physics 1 Active
US11810749B2 Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods Electricity 0 Active
US12288706B2 Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures Physics 0 Active
US11728130B2 Method of recording an image using a particle microscope Electricity 0 Active
US12056865B2 Wafer-tilt determination for slice-and-image process Electricity 0 Active
US12045969B2 Automated root cause analysis for defect detection during fabrication processes of semiconductor structures Physics 0 Active
US10274828B2 Lighting system of a microlithographic projection exposure system and method for operating such a lighting system Physics 0 Active
US9977334B2 Lighting system of a microlithographic projection exposure system and method for operating such a lighting system Physics 0 Active
US10012907B2 Optical system of a microlithographic projection exposure apparatus Physics 0 Active
US11915908B2 Method for measuring a sample and microscope implementing the method Electricity 0 Active
US12283504B2 Contact area size determination between 3D structures in an integrated semiconductor sample Physics 0 Active
US11436506B2 Method and devices for determining metrology sites Physics 0 Active
US10444631B2 Method of operating a microlithographic projection apparatus and illumination system of such an apparatus Physics 0 Active
US8786849B2 Method for measuring an optical system Physics 0 Active
US12148139B2 Methods and evaluation devices for analyzing three-dimensional data sets representing devices Physics 0 Active
US12288705B2 FIB-SEM 3D tomography for measuring shape deviations of HAR structures Electricity 0 Active
US9910359B2 Illumination system of a microlithographic projection exposure apparatus Physics 0 Active
US10061203B2 Beam distributing optical device and associated unit, system and apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.