Adhesive layer of seed crystal, method for preparing a laminate using the same, and method for preparing a wafer
US11447889B2 · kind B2 · utility
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Key dates
| Filing date | Jun 29, 2020 |
| Grant date | Sep 20, 2022 |
| Priority date | — |
| Expiry date | Nov 26, 2040 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B23/02
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An adhesive layer of seed crystal includes a graphitized adhesive layer, wherein the graphitized adhesive layer is prepared by heat-treating a pre-carbonized adhesive layer, and wherein the adhesive layer has Vr value of 28%/mm3 or more, and the Vr value is represented by Equation 1 below:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.