Seal ring structure
US11448318B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2020 |
| Grant date | Sep 20, 2022 |
| Priority date | — |
| Expiry date | Feb 10, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K9/0015
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention provides a seal ring structure, which comprises a substrate, and a seal ring positioned on the substrate, wherein the seal ring comprises an inner seal ring comprising a plurality of inner seal units, wherein each of the inner seal units is arranged at intervals with each other, an outer seal ring comprising a plurality of outer seal units arranged at the periphery of the inner seal ring, wherein each of the outer seal units is arranged at intervals with each other, and a plurality of groups of fence-shaped seal units, wherein at least one group of fence-shaped seal units is positioned between one of the inner seal units and the other adjacent outer seal unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.