Method for continuous tester operation during long soak time testing
US11448688B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 9, 2019 |
| Grant date | Sep 20, 2022 |
| Priority date | — |
| Expiry date | Jul 9, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/003
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods are provided that performs continuous semiconductor testing during long soak time testing using a chamberless single insertion model (SIM) handler and also using a chamberless asynchronous insertion model (AIM) handler having two manipulators. The methods include dividing a group of semiconductors having an ambient temperature into a first subgroup having a plurality of portions and a second subgroup having a plurality of portions, the second subgroup being identical to the first subgroup. The methods also include using thermal chucks to change the temperature of the first portion of the first subgroup and the first portion of a second subgroup prior to testing from ambient temperature to a stabilized designated temperature during a soak time. The methods also include testing all of the portions of the first subgroup and the second subgroup using predetermined protocols that include Soak Time, Test Time, Index Time, and sometimes Wait Time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.