Patent · US Active

Method of manufacturing a microelectronic device having an array of inclined reliefs

US11456403B2 · kind B2 · utility

0Cited by

0References

23Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Stefan Landis · Tullins, FR
Hubert Teyssedre · Grenoble, FR

Key dates

Filing date	Nov 18, 2020
Grant date	Sep 27, 2022
Priority date	—
Expiry date	Mar 9, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH10H20/0363
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method is provided for producing a microelectronic device having a subsequent grating of reliefs of which at least one wall is slanted, the method including providing a structure including a base, and an initial grating of reliefs, each relief having at least one proximal end in contact with the base, a distal end, and at least one wall extending between the proximal end and the distal end; and laying the reliefs of the initial grating on one another, by application of at least one stress on the structure, such that walls facing two adjacent reliefs come into contact, thus generating at least one subsequent grating of reliefs of which at least one wall is slanted.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.