Method for manufacturing molybdenum-containing thin film and molybdenum-containing thin film manufactured thereby
US11459653B2 · kind B2 · utility
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1References
13Claims
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Key dates
| Filing date | Nov 13, 2019 |
| Grant date | Oct 4, 2022 |
| Priority date | — |
| Expiry date | Nov 13, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention provides a method for manufacturing a molybdenum-containing thin film and a molybdenum-containing thin film manufactured thereby. By using a molybdenum (0)-based hydrocarbon compound and a predetermined reaction gas, the method for manufacturing a molybdenum-containing thin film according to the present invention enables easy manufacturing of a highly pure thin film in a simple process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.