Patent · US Active

Ligand-modified filter and methods for reducing metals from liquid compositions

US11465104B2 · kind B2 · utility

0Cited by
4References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 31, 2020
Grant dateOct 11, 2022
Priority date
Expiry dateJan 31, 2040

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC02F2103/346
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.