Patent · US Active

Cryopump with peripheral first and second stage arrays

US11466673B2 · kind B2 · utility

0Cited by

8References

15Claims

0Family size

Assignee

Edwards Vacuum LLC · US

Inventors

Allen J. Bartlett · Milford, US
Gerald M. Szarek · Chelmsford, US
Paul K. Mahoney · Attleboro, US

Key dates

Filing date	Nov 16, 2018
Grant date	Oct 11, 2022
Priority date	—
Expiry date	Mar 23, 2039

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF17C2227/0353
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

In a cryopump, a primary cryopumping array having adsorbent and cooled by a second refrigerator stage extends along radiation shield sides. That array is shielded by a condensing cryopumping array that extends along the primary cryopumping array. The primary cryopumping array may be a cylinder with adsorbent on an inwardly facing surface, and the condensing cryopumping array may comprise an array of baffles having surfaces facing the frontal opening. A raised surface such as a conical surface at the base of the radiation shield redirects molecules received from the frontal opening toward the primary cryopumping array. The refrigerator cold finger may extend tangentially relative to the radiation shield or connect to the base of the radiation shield.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.