Sample inspection apparatus employing a diffraction detector
US11467104B2 · kind B2 · utility
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5References
11Claims
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Key dates
| Filing date | Feb 19, 2021 |
| Grant date | Oct 11, 2022 |
| Priority date | — |
| Expiry date | Apr 10, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/205
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample inspection apparatus includes a source of electromagnetic radiation, a beam former for producing a substantially conical shell of the radiation with the conical shell being incident on a sample to be inspected, a detection surface arranged to receive diffracted radiation after incidence of the conical shell beam upon the sample to be inspected, and an unfocused collimator provided at or close to the detection surface and having a grid structure formed of cells which each stare at different portions of the conical shell.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.