Device and method for linearly moving first and second moving bodies relative to target object
US11469125B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2018 |
| Grant date | Oct 11, 2022 |
| Priority date | — |
| Expiry date | Oct 10, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/7598
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device for linearly moving bases with respect to an object, includes first and second bases, a linear scale provided with graduations at pitches in the moving direction, first and second encoder heads attached to the first and second bases, and a control unit. The control unit maintains an interval between the first and second encoder heads to be constant, and moves the first and second bases while sequentially detects a first and second graduation numbers, and calculates a distance on the scale between the first and second encoder heads by multiplying a difference between the first and second graduation numbers by the pitch, and calculates a position correction coefficient of the scale as a ratio of the interval with respect to the calculated distance, and controls the movement amount of the first movable body and the second movable body based on the position correction coefficient.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.