Patent · US Active

MEMS devices

US11470426B2 · kind B2 · utility

0Cited by

3References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Arnaud Walther · Grenoble, FR
Stefan Barzen · Munich, DE
Wolfgang Klein · Zorneding, DE
Johann Strasser · Schierling, DE

Key dates

Filing date	Aug 9, 2019
Grant date	Oct 11, 2022
Priority date	—
Expiry date	Apr 20, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A micro electrical mechanical systems (MEMS) device includes a flexible membrane disposed over a substrate, and a first backplate disposed over the flexible membrane. The first backplate includes a first plurality of bumps facing the flexible membrane. The MEMS device further includes a plurality of features disposed at the flexible membrane, where each of the plurality of features being associated with a corresponding one of the first plurality of bumps.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.