Automatic assessment method and assessment system thereof for yield improvement
US11480531B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 24, 2019 |
| Grant date | Oct 25, 2022 |
| Priority date | — |
| Expiry date | Jan 12, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An assessment system includes a storage device and a processing circuit. The processing circuit is coupled to the storage device and configured to execute the instructions stored in the storage device. The storage device is configured for storing instructions of extracting at least one feature parameter corresponding to at least one defect detected on an object respectively; determining at least one feature evaluation according to the at least one feature parameter respectively; weighting the at least one feature evaluation to calculate at least one weighted feature evaluation respectively; summing the at least one weighted feature evaluation to calculate at least one total score corresponding to at least one lesson-learnt case; and ranking the at least one total score corresponding to the at least one lesson-learnt case to find out a suspected root cause corresponding to one of the at least one lesson-learnt case with higher priority.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.