Grating structure for a diffractive optic

US11480717B2 · kind B2 · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Josef Weidmann · Feichten, DE
• Peter Speckbacher · Kirchweidach, DE

Key dates

• Filing date: Oct 1, 2019
• Grant date: Oct 25, 2022
• Expiry date: Jul 13, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F9/7088
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A grating structure for a diffractive optic includes grating lines, each of which is approximated by successive segments. Longitudinal axes of the segments each have an angle relative to a first coordinate axis of a reference coordinate system. A first section of a first one of the grating lines is approximated by a first group of the segments, and a second section adjacent to the first section of the first grating line is approximated by a second group of segments. The longitudinal axes of a major portion of the segments of the first group have a first predetermined angle relative to the first coordinate axis of the reference coordinate system, and the longitudinal axes of a major portion of the segments of the second group have a second predetermined angle different from the first predetermined angle relative to the first coordinate axis of the reference coordinate system.