Specimen inspection device and specimen inspection method
US11486822B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2019 |
| Grant date | Nov 1, 2022 |
| Priority date | — |
| Expiry date | Jul 24, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to one embodiment of the present invention, A sample inspection device may provided, a total inspection module scanning a first area comprising a plurality of samples; a precision inspection module performing inspection on a sample determined as a suspected defective sample by the total inspection module in the first area; and a controller processing each data obtained from the total inspection module and the precision inspection module, and detecting a defective sample in the first area, wherein the precision inspection module may include an emitter emitting terahertz wave to the first area, a guide wire guiding an irradiation direction of the terahertz wave, and a vibration unit vibrating the guide wire.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.