Semiconductor device for condition-controlled radio frequency system
US11488802B2 · kind B2 · utility
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4References
9Claims
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Assignee
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Key dates
| Filing date | Jun 21, 2021 |
| Grant date | Nov 1, 2022 |
| Priority date | — |
| Expiry date | Jun 21, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24564
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This application relates to a semiconductor device for a condition-controlled radio frequency (RF) system. In an embodiment of this application, an RF detection apparatus includes: a high-pass filter (HPF), one end of which is electrically coupled to an RF loop electrode of a ceramic heater, and another end of which is grounded; a voltage measurer, connected to the HPF in parallel; and a low-pass circuit, connected to the HPF in parallel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.