Probe head with linear probe

US11493536B2 · kind B2 · utility

Assignee

• MPI CORPORATION · TW

Inventors

• Tzu-Yang Chen · Cukeng, TW
• Chin-Yi Lin · Yuanchang, TW
• Chen-Rui Wu · Cukeng, TW
• Sheng-Yu Lin
• Ming-Ta Hsu · San Jose, US
• Chia Ju Wei · Taipei, TW

Key dates

• Filing date: May 25, 2021
• Grant date: Nov 8, 2022
• Expiry date: May 25, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R1/0675
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A probe head includes upper and lower die units, and a linear probe inserted therethrough and thereby defined with tail, body and head portions. A first bottom surface of the upper die unit and a second top surface of the lower die unit face each other, thereby defining an inner space wherein the body portion is located and includes a plurality of sections each having front width larger than or equal to back width, including a narrowest section whose upper and lower ends have a distance from the first bottom surface and the second top surface respectively. The head and tail portions are offset from each other along two horizontal axes and the body portion is thereby curved. The present invention is favorable in dynamic behavior control of the linear probe which is easy in manufacturing, lower in cost and has more variety in material.