Patent · US Active

Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method

US11500294B2 · kind B2 · utility

0Cited by

4References

14Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Christoph Petri · Oberkochen, DE
Daniel Runde · Satteldorf, DE
Florian Baumer · Oberkochen, DE
Ulrich Mueller · Hamburg, DE

Key dates

Filing date	Jun 6, 2021
Grant date	Nov 15, 2022
Priority date	—
Expiry date	Jun 6, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/7085
WIPO fieldOptics
WIPO sectorInstruments

Abstract

When replacing a mirror in a projection exposure apparatus, a mirror for replacement is initially removed (41). Position- and orientation data of the removed mirror for replacement are measured (43) by a position -and orientation data measuring device. Furthermore, position- and orientation data of a replacement mirror, to be inserted in place of the mirror for replacement, are measured (46) using the position- and orientation data measuring device. Bearing points of the replacement mirror are reworked (48) on the basis of ascertained differences between, firstly, the position- and orientation data of the mirror for replacement and, secondly, the position- and orientation data of the replacement mirror. The reworked replacement mirror is installed (54). This yields a mirror replacement method, in which an adjustment outlay of the replacement mirror in the projection exposure apparatus is reduced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.