Daniel Runde
8Patents
2h-index
18Co-inventors
44Inventor score
Filing activity: Jan 25, 2012 → Jun 6, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9671548B2 | Optical waveguide for guiding illumination light | Physics | 7 | Active |
| US10514608B2 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Physics | 3 | Active |
| US10209620B2 | Illumination system for EUV projection exposure apparatus, EUV projection exposure apparatus including illumination system and method for operating an EUV projection exposure apparatus | Physics | 1 | Active |
| US9025131B2 | Optical beam deflecting element, illumination system including same, and related method | Physics | 0 | Active |
| US9841685B2 | Determination of a corrected variable | Physics | 0 | Active |
| US11048172B2 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Physics | 0 | Active |
| US10254466B2 | Optical waveguide for guiding illumination light | Physics | 0 | Active |
| US11500294B2 | Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.