Material testing by angle-variable illumination

US11506485B2 · kind B2 · utility

Assignees

• Carl Zeiss Industrielle Messtechnik GmbH · DE
• Carl Zeiss Microscopy GmbH · DE

Inventors

• Lars Stoppe · Jena, DE
• Thomas MILDE · Nausnitz, DE
• Michael Totzeck · Schwäbisch Gmünd, DE

Key dates

• Filing date: Oct 25, 2019
• Grant date: Nov 22, 2022
• Expiry date: Oct 25, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G06T2207/10056
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An optical system includes an illumination module configured to illuminate a sample object with at least one angle-variable illumination geometry. The optical system includes an imaging optical unit configured to produce an imaged representation of the sample object that is illuminated with the at least one angle-variable illumination geometry on a detector. The optical system includes the detector, which is configured to capture at least one image of the sample object based on the imaged representation. The optical system includes a controller configured to determine a result image based on a transfer function and the at least one image. A method includes illuminating a sample object with at least one angle-variable illumination geometry, imaging the sample object on a detector, based on the imaged representation, capturing at least one image of the sample object, and, based on a transfer function and the at least one image, determining a result image.