Patent · US Active

Hybrid EO polymer modulator with ALD sealant layer

US11506918B2 · kind B2 · utility

0Cited by

3References

19Claims

0Family size

Assignee

LIGHTWAVE LOGIC, INC. · US

Inventors

Michael S. Lebby · Apache Junction, US
Zhiming Liu · Englewood, US
Baoquan Chen · Maple Grove, US

Key dates

Filing date	Jun 1, 2021
Grant date	Nov 22, 2022
Priority date	—
Expiry date	Jun 4, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG02F1/065
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An EO polymer modulator with conformal atomic layer deposition sealant layers including an active region of a device material stack with an elongated tapered active section positioned on a passive waveguide core. The device material stack supported on a substrate with the passive waveguide core defining light input and light output side surfaces. A conformal atomic layer deposition sealant layer overlying the device material stack including the light input and light output side surfaces, the conformal atomic layer deposition sealant layer defining windows for the light input and light output side surfaces.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.