Module for a vacuum pumping and/or abatement system
US11512688B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2018 |
| Grant date | Nov 29, 2022 |
| Priority date | — |
| Expiry date | Aug 4, 2039 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2240/81
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A module for a vacuum pumping and/or abatement system. The module comprises a frame defining a space, a plurality of facilities inputs configured to receive facilities from a facilities supply, a plurality of facilities outputs configured to output the received facilities out of the module, and a plurality of facilities connection lines located at least partially within the space defined by the frame. The plurality of facilities connection lines connect the facilities inputs to the facilities outputs. The module further comprises a controller configured to control supply of facilities received at the facilities inputs out of the facilities outputs; and control operation of one or more vacuum pumping and/or abatement apparatuses remote from the module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.