Patent · US Active

Fast FOUP swapping with a FOUP handler

US11515187B2 · kind B2 · utility

1Cited by

2,213References

20Claims

0Family size

Assignee

ASM IP Holding B.V. · NL

Inventors

Theodorus G.M. Oosterlaken · Oudewater, NL
Jeroen Fluit · Amsterdam, NL

Key dates

Filing date	Apr 28, 2021
Grant date	Nov 29, 2022
Priority date	—
Expiry date	Apr 28, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/68707
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A vertical batch furnace assembly for processing wafers having a cassette handling space, a wafer handling space, and a first wall and separating the cassette handling space from the wafer handling space. The first wall has at least one wafer transfer opening in front of which, at a side of the first wall which is directed to the cassette handling space, a wafer transfer position for a wafer cassette is provided. The cassette handling space comprises a cassette storage having a plurality of cassette storage positions and a cassette handler configured to transfer wafer cassettes between the cassette storage positions and the wafer transfer position. The cassette handler has a first cassette handler arm and a second cassette handler arm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.