Polymer compositions for self-assembly applications
US11518730B2 · kind B2 · utility
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50References
29Claims
0Family size
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Key dates
| Filing date | Aug 16, 2017 |
| Grant date | Dec 6, 2022 |
| Priority date | — |
| Expiry date | Jun 24, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08F2810/20
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a composition comprises at least one random copolymer having at least one repeat unit of structure (1), The present invention also relates to novel processes for forming patterns using this novel crosslinked layer on a substrate by enable a film of a block copolymer coated on the novel crosslinked layer to undergo self-assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.