Nitride protective coatings on aerospace components and methods for making the same

US11519066B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• David Alexander BRITZ · Los Gatos, US
• Lance A. Scudder · Sunnyvale, US
• Yuriy Melnik · San Jose, US
• Sukti Chatterjee · San Jose, US

Key dates

• Filing date: Jul 6, 2020
• Grant date: Dec 6, 2022
• Expiry date: Dec 3, 2040

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02T50/60
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Embodiments of the present disclosure generally relate to protective coatings on various substrates including aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on an aerospace component includes forming an aluminum oxide layer on a surface of the aerospace component and depositing a boron nitride layer on or over the aluminum oxide layer during a vapor deposition process. In some examples, the method includes depositing a metal-containing catalytic layer on the aluminum oxide layer before depositing the boron nitride layer. The boron nitride layer can include hexagonal boron nitride (hBN).