Modular vacuum pumping and/or abatement system
US11519401B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Nov 5, 2018 |
| Grant date | Dec 6, 2022 |
| Priority date | — |
| Expiry date | Aug 22, 2039 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2240/81
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum pumping and/or abatement system for evacuating and/or abating fluid from an entity, the system comprising: a first module comprising a vacuum pumping apparatus for pumping the fluid from the entity and/or an abatement apparatus for abating the fluid evacuated from the entity; and a second module arranged adjacent to the first module in a first system dimension; wherein the first and second modules each have a maximum size in the first system dimension that is a respective integer multiple of a common fixed system value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.