Optimizing an apparatus for multi-stage processing of product units
US11520238B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2021 |
| Grant date | Dec 6, 2022 |
| Priority date | — |
| Expiry date | Sep 20, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F18/2135
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of optimizing an apparatus for multi-stage processing of product units such as wafers, the method includes: receiving object data representing one or more parameters measured across the product units and associated with different stages of processing of the product units; and determining fingerprints of variation of the object data across the product units, the fingerprints being associated with different respective stages of processing of the product units. The fingerprints may be determined by decomposing the object data into components using principal component analysis for each different respective stage; analyzing commonality of the fingerprints through the different stages to produce commonality results; and optimizing an apparatus for processing product units based on the commonality results.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.