Flat panel detection substrate, fabricating method thereof and flat panel detector

US11522090B2 · kind B2 · utility

Assignee

• BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD. · CN

Inventors

• Kui Liang · Beijing, CN
• Xiaohui Liu · Fujian, CN
• Hu Meng · Beijing, CN
• Dali Liu · Beijing, CN
• Liye Duan · Beijing, CN
• Chiachiang Lin · Beijing, CN

Key dates

• Filing date: Dec 16, 2019
• Grant date: Dec 6, 2022
• Expiry date: Feb 8, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F30/2275

Abstract

The present disclosure provides a flat panel detection substrate, a fabricating method thereof and a flat panel detector. The flat panel detection substrate according to the present disclosure includes a base substrate; a bias electrode and a sense electrode on the base substrate; and a semiconductor layer over the bias electrode and the sense electrode, the semiconductor layer having a thickness greater than 100 nm.