Patent · US Active

CMOS compatible dew point sensor device and method of determining a dew point

US11525793B2 · kind B2 · utility

0Cited by
3References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 8, 2021
Grant dateDec 13, 2022
Priority date
Expiry dateMay 18, 2041

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N25/68
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

In an embodiment a method includes determining, for each capacitor element of a plurality of capacitor elements of a capacitor, an increase of a capacitance of a capacitor element caused by a decrease of a temperature of the capacitor and deriving a dew point from a temperature at which the increases of the capacitances or values corresponding to the increases of the capacitances exceed a predefined limit by generating a set of binary digits, each of the binary digits corresponding to one of the capacitor elements and indicating whether the capacitance of the capacitor element is within a predefined range, comparing sets of binary digits generated at different temperatures and determining a number of capacitor elements for which the corresponding binary digits of the sets are different and repeating the comparison for a sequence of sets generated at decreasing temperatures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.