Electronic blackbody cavity and secondary electron detection device using the same
US11527335B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Apr 8, 2021 |
| Grant date | Dec 13, 2022 |
| Priority date | — |
| Expiry date | Aug 5, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24405
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A electronic blackbody cavity is provided. The electronic blackbody cavity comprises an inner surface; a chamber surrounded by the inner surface; an opening configured to make an electron beam enter the chamber; and a porous carbon material layer located on the inner surface. The porous carbon material layer consists of a plurality of carbon material particles and a plurality of micro gaps. The plurality of micro gaps are defined by the plurality of carbon material particles. A secondary electron detection device using the electronic blackbody cavity is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.