OLED anode structures including amorphous transparent conducting oxides and OLED processing method comprising the same

US11527732B1 · kind B1 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Chung-Chia Chen · La Habra, US
• Yu-Hsin Lin · San Diego, US
• Jungmin Lee · Santa Clara, US
• Takuji Kato · Fukuoka, JP
• Dieter Haas · Bruchköbel, DE
• Si Kyoung Kim · Gwangju-si, KR
• Ji-Young Choung · Yongin-si, KR

Key dates

• Filing date: May 31, 2022
• Grant date: Dec 13, 2022
• Expiry date: May 31, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K2102/103

Abstract

Exemplary methods of backplane processing are described. The methods may include forming a first metal oxide material on a substrate. The methods may include forming a metal layer over the first metal oxide material. The metal layer may be or include silver. The methods may include forming an amorphous protection material over the metal layer. The amorphous protection material may include a second metal oxide material. The methods may include forming a second metal oxide material over the amorphous protection material. The second metal oxide material may include a crystalline material having one or more grain boundaries. The grain boundaries may include one or more voids.