Module for a vacuum pumping and/or abatement system
US11530694B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2018 |
| Grant date | Dec 20, 2022 |
| Priority date | — |
| Expiry date | Feb 5, 2039 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2240/81
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A module for a vacuum pumping and/or abatement system includes a top side, a bottom side, a front side, a rear side, and two opposing lateral sides, which together define a space. The module comprises an apparatus located wholly within the space and one or more connection points coupled to the apparatus. Each of the connection points is for receiving an input for the apparatus or receiving an output from the apparatus. The one or more connection points are located at the top side. The module has a maximum size in a first system dimension that is equal to a first integer multiple of a fixed system value, the first system dimension being a dimension between the lateral sides. For each connection point, a distance between that connection point and each lateral side in the first system dimension is a respective second integer multiple of the fixed system value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.