Magnetic integrated lift pin system for a chemical processing chamber
US11545387B2 · kind B2 · utility
0Cited by
35References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2019 |
| Grant date | Jan 3, 2023 |
| Priority date | — |
| Expiry date | Jul 27, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67259
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention provides lift pin strategies with a reduced risk of causing contamination due to the up and down actuation of lift pins. The present invention provides a lift pin system that uses electromagnetic actuation strategies in order to raise and lower lift pins. The electromagnetic forces act remotely on the lift pins so that direct contact or coupling of the lift pins to actuation components is not required. This avoids contamination that otherwise would be associated with friction and associated lubricants used for mechanical actuation strategies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.