Todd Maciej
6Patents
3h-index
15Co-inventors
54Inventor score
Filing activity: Jan 16, 1996 → Jul 11, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6979165B2 | Reduced footprint tool for automated processing of microelectronic substrates | Emerging Cross-Sectional Technologies | 24 | Expired |
| US5820692A | Vacuum compatible water vapor and rinse process module | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6135156A | Tubing closure | Mechanical Engineering; Lighting; Heating | 11 | Expired |
| US7134827B2 | Reduced footprint tool for automated processing of microelectronic substrates | Emerging Cross-Sectional Technologies | 3 | Expired |
| US6845779B2 | Edge gripping device for handling a set of semiconductor wafers in an immersion processing system | Emerging Cross-Sectional Technologies | 2 | Expired |
| US11545387B2 | Magnetic integrated lift pin system for a chemical processing chamber | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.