Patent · US Active

Chip packaging method and chip packaging structure

US11552028B2 · kind B2 · utility

0Cited by
4References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 25, 2020
Grant dateJan 10, 2023
Priority date
Expiry dateSep 25, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH03H9/02992
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method for packaging a chip and a chip packaging structure. A passivation layer is provided on bonding pads of a wafer, a first metal bonding layer is formed on the passivation layer, and a second metal bonding layer is formed on a substrate. The substrate and the wafer are bonded via the first metal bonding layer and the second metal bonding layer, and are packaged as a whole. A first shielding layer is provided on the substrate, and the first shielding layer is in contact with the second metal bonding layer. After the wafer and the substrate are bonded, the wafer is subject to half-cutting to expose the first metal bonding layer. Then, the second shielding layer electrically connected to the first metal bonding layer is formed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.