Patent · US Active

Method of coating a flexible substrate in a R2R deposition system, and vapor deposition system

US11552283B2 · kind B2 · utility

0Cited by

1References

11Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Andreas Sauer · Großostheim, DE
Thomas DEPPISCH · Aschaffenburg, DE
Mathew Dean ALLISON · Frankfurt, DE

Key dates

Filing date	Aug 4, 2020
Grant date	Jan 10, 2023
Priority date	—
Expiry date	Sep 16, 2040

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E60/10
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A method of coating a flexible substrate in a roll-to-roll deposition system is described. The method includes unwinding the flexible substrate from an unwinding roll, the flexible substrate having a first coating on a first main side thereof; measuring a lateral positioning of the first coating while guiding the flexible substrate to a coating drum; adjusting a lateral position of the flexible substrate on the coating drum depending on the measured lateral positioning of the first coating; and depositing a second coating on the flexible substrate, particularly on a second main side of the flexible substrate opposite the first main side. Further described is a vacuum deposition apparatus for conducting the methods described herein.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.