Distributed Bragg reflectors including periods with airgaps
US11567277B1 · kind B1 · utility
0Cited by
11References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2021 |
| Grant date | Jan 31, 2023 |
| Priority date | — |
| Expiry date | Sep 13, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/346
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Structures that include a distributed Bragg reflector and methods of fabricating a structure that includes a distributed Bragg reflector. The structure includes a substrate, an optical component, and a distributed Bragg reflector positioned between the optical component and the substrate. The distributed Bragg reflector includes airgaps and silicon layers that alternate in a vertical direction with the airgaps to define a plurality of periods.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.