Patent · US Active

Asymmetrical semiconductor nanowire field-effect transistor

US11575005B2 · kind B2 · utility

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17Claims
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Assignee

Inventors

Key dates

Filing dateMar 30, 2018
Grant dateFeb 7, 2023
Priority date
Expiry dateNov 27, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/85
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

An integrated circuit structure includes: a semiconductor nanowire extending in a length direction and including a body portion; a gate dielectric surrounding the body portion; a gate electrode insulated from the body portion by the gate dielectric; a semiconductor source portion adjacent to a first side of the body portion; and a semiconductor drain portion adjacent to a second side of the body portion opposite the first side, the narrowest dimension of the second side of the body portion being smaller than the narrowest dimension of the first side. In an embodiment, the nanowire has a conical tapering. In an embodiment, the gate electrode extends along the body portion in the length direction to the source portion, but not to the drain portion. In an embodiment, the drain portion at the second side of the body portion has a lower dopant concentration than the source portion at the first side.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.